performance

Full scale(N2 Eqv)

2 sccm – 5 slm

5 slm – 50 slm

30 slm – 200 slm

200 slm – 500 slm

Control scope

2% - 100% F.S.

Response time

≤ 1.0 s Reach full scale±1%

≤ 3.0 s Reach full scale±2%

Flow accuracy

≤±1% S.P.(25%-100% F.S.)

≤±0.25% F.S.(2%-25% F.S.)

≤±2% F.S

Linearity

≤±0.5% F.S.

≤±1% F.S.

Repeatability

≤±0.2% F.S.

Normal working pressure

0.05 MPa – 0.28 MPa

5 slm – 23 slm: 0.07 MPa - 0.25 Mpa

23 slm – 50 slm: 0.14MPa – 0.28 Mpa

0.15 MPa - 0.30 MPa

0.20 MPa – 0.30 MPa

Maximum working pressure difference

0.48 MPa (≈70 psig)

Compressive strength

Max 1.03 MPa (150 psig)

Valve leakage rate

Fluororubber: Max 1*10-7  Pa.m3/s (He)

Metal: Max 1*10-11  Pa·m3/s (He)

Operating temperature

Standard products：5℃ – 45℃

High temperature integrated products：45℃ - 70℃

High temperature split products：70℃ - 120 ℃

Mechanical configuration

Valve Type

Normally Open(NO)/Normally Closed(NC)/No valve(Flow Meter)

Seals

Fluororubber/Metal

Material

Stainless Steel 316L, PTFE, FKM, FFKM

Surface treatment

Ra: ≤5 (Metal)

Electrical configuration

electrical signals

(4 - 20)mA, 0-5VDC: 9P-Dsub*1

(4 - 20)mA, 0-5VDC: 9P-Dsub*1, RS485: RJ11*2

ProfiBus-DP: Bus: 9P-Dsub(F)*1, Power: 9P-Dsub(M)*1

DeviceNet: 5-Pin M12*1, RJ11*1

EtherCAT: RJ45*2, 5-Pin M8*1

ProfiNet: RJ45*2, 5-Pin M8*1

Input Power

+ 15 VDC ±2% at 50 mA

- 15 VDC ±2% at 250 mA maximum

24 VDC ±15% at 300 mA maximum

Power consumption

3.5W

4.5W

Optional Configuration

Integrated control panel

TFTtouch screen：Readable、Control and calculate gas mass flow，Only rubber seal products are supported

Multi-gas multi-range

Traffic segment：2sccm – 50slm

Control scope ：5% - 100% F.S.

Accuracy： ±1.5%（5-100% F.S.）

Only metal seals are supported

Only supports digital communication、DeviceNet And EtherCAT communication

I

Model

E60

Gas mass flow control

EM66

Gas mass flow meter

II

Application

ST

5℃-45℃Standard application

HT

High temperature application（45℃ - 70℃),  integrated model

HTS

High temperature application（45℃ - 120℃),Split model

III

Configuration

C

Standard Bins (calibrated with N2, MGMR), supports products with flow range of <50slm

X

Preset gas (Multi-one, single gas)

IV

Gas or Standard Bin

XXXX-XXXX

Semiconductor gas code and range, (51 - 500)slm only supports single gas setting

PS60-010C

Multi-0: N2 (Eqv) 10 sccm F.S.

PS61-030C

Multi-1: N2 (Eqv) 30 sccm F.S.

PS62-100C

Multi-2: N2 (Eqv) 100 sccm F.S.

PS63-300C

Multi-3: N2 (Eqv) 300 sccm F.S.

PS64-001L

Multi-4: N2 (Eqv) 1000 sccm F.S.

PS65-003L

Multi-5: N2 (Eqv) 3000 sccm F.S.

PS66-005L

Multi-6: N2 (Eqv) 5000 sccm F.S.

PS67-010L

Multi-7: N2 (Eqv) 10000 sccm F.S.

PS68-030L

Multi-8: N2 (Eqv) 30000 sccm F.S.

PS69-050L

Multi-9: N2 (Eqv) 50000 sccm F.S.

V

Gas Line Interface

61

1/4" SwageLok male，Only rubber seal products are supported

62

3/8" SwageLok male，Only rubber seal products with flow rates of 5slm and above are supported

63

1/4" VCR male

65

1.125" C-seal，Only metal seal products are supported

66

1.125" W-seal，Only metal seal products are supported

67

1.5" C-seal，Only metal seal products are supported

68

1.5" W-seal，Only metal seal products are supported

69

6mm SwageLok male，Only rubber seal products are supported

70

8mm SwageLok male，Only rubber seal products with flow rates of 5slm and above are supported

71

10mm SwageLok male，Only rubber seal products with flow rates of 5slm and above are supported

72

1/2" SwageLok male，Only rubber seal products with flow rates of 5slm and above are supported

73

1/2" VCR male，Only supports products with a flow rate of 5slm and above

74

6mmHose, only supports rubber seal products

75

8mmHose, only supports rubber seal products

VI

Valve Status

C

Normally Closed

O

Normally open, only supports flow range below 50slm

N

No valve（EM66）

VII

Seal Material

F

Fluororubber（default）

M

Metal

VIII

Communication/Power Interface

DZ

RS485 digital communication, analog compatible, 0 - 5 VDC, ±15V power supply

DY

RS485 digital communication, compatible with analog, 4mA -20mA, ±15V power supply

DX

RS485 digital communication, analog compatible, 0 - 5 VDC, 24V power supply

DW

RS485 digital communication, compatible with analog, 4mA-20mA, 24V power supply

MZ

Modbus communication, analog compatible, 0 - 5 VDC, ±15V power supply

MY

Modbus communication, compatible with analog, 4mA -20mA, ±15V power supply

MX

Modbus communication, analog compatible, 0 - 5 VDC, 24V power supply

MW

Modbus communication, compatible with analog, 4mA-20mA, 24V power supply

PZ

ProfiBus protocol communication

NZ

DeviceNet protocol communication

EZ

EtherCAT protocol communication

RZ

ProfiNet protocol communication

IX

Special Requirements

XXXX

Customer special requirement code

I

II

III

IV

V

VI

VII

VIII

IX

E60

ST

C

PS60-010C

63

C

M

NZ

XXXX