◼PRODUCT DESCRIPTION
Lead Fluids stands out with its outstanding technical strength in the field of gas mass flow measurement and control. We always adhere to the commitment of providing customers with outstanding, stable and reliable gas measurement and control technology, as well as a full range of solutions. Whether it is semiconductor, solar photovoltaic, automotive industry, or new energy, medical equipment, environmental monitoring, biochemistry and life sciences, we can provide customers with tailor-made high-quality services to accurately meet the stringent requirements for gas measurement and control and process management. In the face of the ever-changing market demand and the continuous improvement of customer expectations, we always keep pace with the times to ensure that our services can adapt to the rapid iteration of terminal applications and meet the diverse needs of customers.
◼PRODUCT FEATURES
Good repeatability
The T Series MFC is highly acclaimed for its outstanding performance in the field of gas flow control. Among them, excellent repeatability is one of its characteristics. Whether in continuous operation mode or intermittent operation mode, the T Series MFC can show stable and reliable performance. This means that even during long-term use, the flow control accuracy of the T Series MFC can remain consistent, providing users with a more accurate and reliable gas flow control solution.
Gas Mass Flow Controller Model | T70 |
Performance | Range (N2 equivalent) | 2 sccm – 5 slm | 5 slm – 23 slm | 23 slm – 50 slm |
Control range 1 | Preset gas： 2% - 100% F.S. MGMR： 5% - 100% F.S. |
Flow accuracy | ≤±1% S.P.(25%-100% F.S.)3 ≤±0.25% F.S.(2%-25% F.S.)3 |
Response time | ≤ 1.0 s4 |
Valve leakage rate | Max 1*10^-11 Pa.m3/s (He) |
Repeatability | ≤ ±0.15% F.S. |
Working conditions | Normal working pressure 2 | (0.05 – 0.35)MPa | (0.07 - 0.25)MPa | (0.14 - 0.35)MPa |
Maximum working pressure 5 | 0.48 MPa (≈70 psia) |
Pressure resistance 5 | Max 3.0 MPa (≈435 psia) |
Working environment temperature | Standard products： 5℃ – 45℃ High temperature integrated products： 45℃ - 70℃ High temperature split products： 70℃-120 ℃ |
Valve type | Normally Open (NO)、Normally Closed (NC) |
Material | Surface treatment | conform to Semi F19, EP Ra: ≤5μinch |
Material | conform to Semi F20, SUS 316L, UHP |
Seals | Metal |
Communication circuit and electrical interface | Analog signal communication: (4 - 20)mA, 0 - 5 VDC, 9P-Dsub*1 RS485 digital communication: (4 - 20)mA, 0 - 5 VDC, 9P-Dsub*1, RS485: RJ11*2 Profibus protocol communication: Bus: 9P-Dsub(F)*1; Power: 9P-Dsub(M)*1 DeviceNet protocol communication: 5-Pin M12*1, RJ11*1 EtherCAT protocol communication: RJ45*2, 5-Pin M8*1 ProfiNet protocol communication: RJ45*2, 5-Pin M8*1 |
Optional multi-gas multi-range | Flow range: 2sccm – 50slm Control range: 5% - 100% F.S. Accuracy: ±1.5% (5-100% F.S.) Only supports metal seals Only supports digital communication, DeviceNet and EtherCAT communication |
Notes:
1. The control range of T series products can be customized from 1% to 100% F.S.
2. The working pressure of T series products with a range of 2sccm to 5slm can be customized to 0.007MPa
3. When using digital mode for measurement, the ambient temperature is 22℃±3℃
4. The response time is from 0 to 10% S.P. or above, and the ambient temperature is 22℃±10℃ during measurement
5. T70 can be customized to withstand high pressure
◼SUPPORTED GASES
This product supports 440 industrial and special gases, covering the following categories:
• Conventional industrial gases (such as N₂, O₂, Ar, etc.);
• Semiconductor-grade special gases (including high-purity gases for etching, deposition and doping);
• Customized mixed gases (precise ratio solutions can be provided according to customer needs);
If you need to confirm whether a specific gas is in the compatible list, please contact our technical sales team to obtain the latest gas list and adaptation solution.
◼COMMUNICATION PROTOCOL
Pioneer Yuanchuang Fluid MFC products support traditional analog I/O, DeviceNet, Profibus, RS-485/Modbus RTU, EtherCAT, Profinet and other industrial buses and Ethernet communication protocols.
Encoding | Definition | Options | Option Definition |
I | Model | T70 | Gas mass flow controller |
II | Application | ST | Standard applications |
LP | Low pressure differential applications（PSID≈10 torr - 100 torr） |
HT | High temperature applications (45℃ - 70℃), integrated models |
HTS | High temperature applications (45℃ - 120℃), split models |
III | Configuration | C | Standard Bins (calibrated with N2, MGMR) |
X | Preset gases (Multi-one, single gas) |
IV | Gas or Standard Bin | XXXX-XXXX | Semiconductor special gas codes and ranges |
PS60-010C | Multi-0: N2(Eqv) 10 sccm F.S. |
PS61-030C | Multi-1: N2(Eqv) 30 sccm F.S. |
PS62-100C | Multi-2: N2(Eqv) 100 sccm F.S. |
PS63-300C | Multi-3: N2(Eqv) 300 sccm F.S. |
PS64-001L | Multi-4: N2(Eqv) 1000 sccm F.S. |
PS65-003L | Multi-5: N2(Eqv) 3000 sccm F.S. |
PS66-005L | Multi-6: N2(Eqv) 5000 sccm F.S. |
PS67-010L | Multi-7: N2(Eqv) 10000 sccm F.S. |
PS68-030L | Multi-8: N2(Eqv) 30000 sccm F.S. |
PS69-050L | Multi-9: N2(Eqv) 50000 sccm F.S. |
V | Pipeline interface and shell width | 63 | 1/4" VCR male |
65 | 1.125" C-seal |
66 | 1.125" W-seal |
73 | 1/2" VCR male |
VI | Valve status | C | Normally closed |
O | Normally open |
VII | Seal material | M | Metal |
VIII | Communication/power supply interface | DZ | RS485 digital communication, compatible with analog, 0 - 5 VDC, ±15V power supply |
DY | RS485 digital communication, compatible with analog, 4mA -20mA, ±15V power supply |
DX | RS485 digital communication, compatible with analog, 0 - 5 VDC, 24V power supply |
DW | RS485 digital communication, compatible with analog, 4mA -20mA, 24V power supply |
MZ | Modbus communication, compatible with analog, 0 - 5 VDC, ±15V power supply |
MY | Modbus communication, compatible with analog, 4mA -20mA, ±15V power supply |
MX | Modbus communication, compatible with analog, 0 - 5 VDC, 24V power supply |
MW | Modbus communication, compatible with analog, 4mA -20mA, 24V power supply |
PZ | ProfiBus protocol communication, does not support MGMR |
NZ | DeviceNet protocol communication |
EZ | EtherCAT protocol communication |
RZ | ProfiNet protocol communication, does not support MGMR |
IX | Special requirements | XXXX | Customer special requirement code |
Product code selection example: T70 model, standard application, MGMR, 1/4 VCR, valve normally closed, metal seal, DeviceNet communication |
I | II | III | IV | V | VI | VII | VIII | IX |
T70 | ST | C | PS60-010C | 63 | C | M | DZ | XXXX |
