◼PRODUCT DESCRIPTION
With the development of the semiconductor industry, the process size of wafer manufacturing has been continuously reduced to 2nm or even lower. High-precision, responsive and repeatable gas flow control methods are crucial in the wafer processing process.
With the advent of small flow control, short process times, and continuous plasma processes, high-end MFCs are struggling to meet the accuracy, stabilization time, and repeatability requirements required to ensure high throughput and match reaction chambers.
With the advent of small flow control, short process times and continuous plasma processes, high-end MFCs are struggling to meet the accuracy, stabilization time and repeatability requirements required to ensure high throughput and match the reaction chamber.
The MFC of Pioneer Fluid paves the way for the future of gas flow control. The product combines the high-precision MFM system with control valve technology and is patented. As a result, the MFC of Pioneer Fluid achieves an order of magnitude improvement in key flow indicators, leading the existing MFC technology and can be applied to advanced wafer manufacturing processes.
◼PRODUCT FEATURES
The MFC of Pioneer Fluid has a patented dual-valve control design that supports extremely high-precision and extremely wide-range flow measurement. Our MFC uses pressure sensors and position sensors to automatically monitor, measure, and control gas flow more accurately and quickly.
With real-time flow calibration capability
The MFC performs a robust flow monitoring function while in operation. This unique feature enables highly accurate, NIST-traceable flow measurement during operation and significantly reduces downtime.
◼EXTREMELY SHORT RESPONSE TIME
The MFC of Pioneer Fluid has the shortest response time among similar products of flow controller: the stabilization time after changing the gas flow setting is less than 100 milliseconds (refer to the figure below)
◼INSENSITIVE TO PRESSURE AND TEMPERATURE
The Pioneer Yuanchuang Fluid MFC product has a unique position control valve design.This design makes the MFC unaffected by upstream and downstream pressure or temperature changes.
The MFC does not need to consider the temperature coefficient, because the highly sensitive sensor will monitor the pressure and temperature of the measured gas at a frequency of once per millisecond, and the MFC control system will directly control the valve to move to the correct opening position
Mass Flow Controller Model | V100 | V100T | V100S |
performance | Range | 0.1 - 2000 sccm |
Flow accuracy | The accuracy at the set value under actual gas conditions is ±0.5%: 0.1 - 20 sccm; 1 − 200 sccm; 5− 1000 sccm; 10 − 2000 sccm |
Response time | ≤100 ms (10% − 100% F.S.); ≤300 ms (0.5% - 10% F.S.)* | ≤50 ms (10% − 100% F.S.) |
Sealing | ≤ 1E-9 atm.cc/sec (He) |
Valve leakage rate | 0.01 sccm, 0.1 sccm, 0.5 sccm, 1.0 sccm |
Repeatability | The accuracy at the set value is±0.2% (0.5%-100% F.S.) |
Working conditions
| Upstream pressure | standard: 100 − 300kPaG (14.5 − 43.5 psig) low-pressure gasC4H9F, SiH2Cl2, C3H10Si, BCl3, C4F6, C4F6-q, C4F8, C5F8, SiCl4 and WF6，Inlet pressure range can be as low as-81 kPaG (- 11.7 psig) Please refer to the Gas Bin Parameters table on pages 5 and 6 for specific ranges. |
Downstream pressure | Vacuum to 53 kPa (0 − 400 Torr) |
Compressive strength | 2.07 MPaG (300 psig) |
Design pressure (burst pressure) | 2.65 MPaG (385 psig) |
Operating temperature | 15−50°C | 15-70°C | 15−50°C |
Material | Gas path surface | Semi F20 compliant316 SS |
Surface treatment | Average Ra value is 5 µin |
Seals | Metal (PCTFE optional) |
Communication circuit | EtherCAT | 24 VDC |
DeviceNet | 11 − 24 VDC, 5 W |
Analog and RS-485 | ± 15 VDC, 150 mA |
Inrush Current | <200 mA |
* The setpoint hold time during analog control is 60 milliseconds and does not include the response time of the device as stated in this manual. When operating using analog control, the minimum sensitivity of the MFC setpoint is ±50mV, but flow accuracy is not affected. The measured setpoint and its corresponding flow feedback may differ from the required setpoint by this amount (±50mV). In order to keep the device input value consistent with the controller output value, we recommend analog calibration. |
◼PRODUCT DESCRIPTION CODE
coding | Interpretation | Options | Option explanation |
I | model | V100 | Standard gas flow controller |
V100T | Gas flow controller suitable for 70°C working environment and HF gas |
V100S | Gas flow controller with reduced response time to 50ms |
II | Special applications | XX | Standard applications |
LP | Low pressure gas* |
III | Configuration | C | Standard Bins (calibrated with N2) |
X | Preset gas |
IV | Gas or standard Bin | XXXX XXXX | Semiconductor specialty gas code and range |
PS01-020C | Lead Yuanchuang Fluid Standard Bin 01 0.1-20 sccm N2 |
PS01-200C | Pioneer Fluid Standard Bin 02 21-200 sccm N2 ** |
PS01-001L | Pioneer Fluid Standard Bin 03 201-1000 sccm N2 ** |
PS04-002L | Pioneer Fluid Standard Bin 04 1001-2000 sccm N2 ** |
V | Pipe interface and shell width | 01 | VCR 1.125" |
02 | C-Seal 1.125" |
03 | W-Seal 1.125" |
06 | VCR 1.125“, PCTFE valve seat |
07 | C-Seal 1.125", PCTFE valve seat |
08 | W-Seal 1.125", PCTFE valve seat |
09 | VCR 1.125", Only PCTFE is used in MFM valve seats |
10 | C-Seal 1.125", Only PCTFE is used in MFM valve seats |
11 | W-Seal 1.125", Only PCTFE is used in MFM valve seats |
VI | Valve status | C | Normally Closed |
VII | Downstream pressure environment | V | vacuum |
A | Normal pressure - This option does not support low pressure gas delivery, and the inlet pressure must be ≥60psia |
VIII | Communication/power supply interface | model | I/O | Connectors | Power On Status | Full scale setting | Poll I/O Instance | I/O status switching polling | Signal Delay (ms) | Baud rate | Mac ID |
send | take over |
DA | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 6000h | 2 | 7 | Executing | 0 | 500KB | 63 |
DB | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 6000h | 21 | 7 | Executing | 0 | 500KB | 63 |
DC | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 6000h | 2 | 8 | Executing | 0 | 500KB | 63 |
DD | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 6000h | 21 | 8 | Executing | 0 | 500KB | 63 |
DE | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 6000h | 6 | 8 | Executing | 0 | 500KB | 63 |
DF | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 6000h | 22 | 7 | Executing | 0 | 500KB | 63 |
DG | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 6000h | 3 | 7 | Executing | 0 | 500KB | 63 |
DH | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 7FFFh | 3 | 7 | Executing | 0 | 500KB | 63 |
DI | DeviceNet | 5 Pin Micro | Idle | SCCM | Float | 6000h | 14 | 19 | Executing | 0 | 500KB | 63 |
DJ | DeviceNet | 5 Pin Micro | Idle | SCCM | Float | 6000h | 23 | 20 | Executing | 0 | 500KB | 63 |
DK | DeviceNet | 5 Pin Micro | Idle | SCCM | Float | 7FFFh | 13 | 19 | Executing | 0 | 500KB | 63 |
DL | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 7FFFh | 6 | 8 | Executing | 0 | 500KB | 63 |
DM | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 6000h | 2 | 7 | Executing | 0 | 500KB | 63 |
DN | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 7FFFh | 22 | 7 | Executing | 0 | 500KB | 63 |
DO | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 6000h | 22 | 8 | Executing | 0 | 500KB | 63 |
DP | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 7FFFh | 3 | 7 | Executing | 500 ms | 500KB | 63 |
DQ | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 7FFFh | 1 | 8 | Executing | 0 | 500KB | 63 |
DR | DeviceNet | 5 Pin Micro | Idle | Count | Integer | 603d | 22 | 8 | Executing | 0 | 500KB | 63 |
EA | EtherCAT | Comm: RJ45 Pwr: 5 pin Nano | INIT | NA | NA | NA | NA | NA | NA | NA | NA | 0 |
Analog DB9 Pin-Out |
model | I/O | Connectors | Valve Override | Traffic Feedback | power supply | Flow rate Set point | Signal ground | RS 485 | Test Point |
+ | General | - | + | - |
AA | Analog | 9-Pin D | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | NA |
AB | Analog | 9-Pin D | 1 | 2 | 3 | 4 | 5 | 6 | 7, 8 | NA | NA | 9 |
AC | Analog | 20-pin Honda | 14 | 3 | 4 | 2 | 16 | 11 | 12 | 8 | 9 | NA |
AD | Analog | 20-pin Honda | 14 | 3 | 4 | 2 | 16 | 5 | 12 | 8 | 9 | NA |
AG | Analog | Card Edge–RJ11 | J | 3 | 4 | 2 | F | A | B+C+10 | 3, 4 | 2, 3 | NA |
AH | Analog | DB9 to DB15 | NA | NA | 7 | 5 | 5 | 8 | NA | NA | NA | NA |
AK | Analog | 20-pin Honda | 1 | 2 | 3 | 4 | 5 | 6 | 7, 8 | NA | NA | NA |
AL | Analog | Card Edge | NA | 3 | 4 | 2 | F | A | B+C | NA | NA | NA |
AM | Analog | Card Edge – Purge Enabled | D | 3 | 4 | 2 | F | A | B+C | NA | NA | NA |
RA | RS-485 | 9-Pin D | NA | NA |
|
|
| NA | NA |
|
|
|
RB | RS-485 | 9-Pin D | NA | NA |
|
|
| NA | NA |
|
|
|
RC | RS-485 | 9-Pin D, RJ45 | NA | NA |
|
|
| NA | NA |
|
|
|
IX | Special Requests | XXXX | Customer special requirement code |
*: -0113 | Expanded maximum full scale settings for Ar, N2, F2, N2O, O2, and 20% F2 in Ar at 3000 sccm to allow use of Bin 4. Inlet pressure range is 35.3 psig - 43.5 psig |
**: -0126 | When the inlet pressure is at least 35.3 psig, the following gases can be measured at a higher maximum flow rate: C2F6, CF4, CH2F2, CH3F, CHF3, Cl2, COS, COS-s, and SF6. |
*Required for low-pressure gases: BCl3, C3F6, C3H2F6, C3H10Si, C4F6, C4F6-q, C4F8, C4H2F6, C4H9F, C5F8, SiH2Cl2, ClF3, SiCl4, and WF6.
** Not applicable when selecting Special Application LP (Low Pressure Gas).
***1.5" W-Seal is not suitable for the 20 sccm MFC (Bin 1).
If you are interested in other gases and/or configurations, please contact our sales representatives.
◼GAS PARAMETER TABLE
gas | Gas No. | Bin 1: 20 sccm | Bin 2: 200 sccm | Bin 3: 1000 sccm | Bin 4: 2000 sccm | Input Gas Pressure Range (psig) | Maximum Downstream Gas Pressure (Torr) |
Minimum Flow | Full scale setting | Minimum Flow | Full scale setting | Minimum Flow | Full scale setting | Minimum Flow
| Full scale setting |
Min | Max | Min | Max | Min | Max | Min | Max |
Air | 8 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
Ar | 4 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000/3000 | 14.5/35.3 - 43.5* | 400 |
BCl3 | 70 | 0.1 | 6 | 10 | 1 | 11 | 100 | 5 | 101 | 500 | - | - |
| 0.3 - 8.2 | 400 |
C2F6 | 118 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 |
10 | 1001 | 1000/2000 | 14.5/35.3 - 43.5** | 400 |
C2F4O | 400 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | - | - | - | 14.5 - 43.5 | 400 |
C2H2F4 | 156 | 0.1 | 6 | 20 | 1 | 21 | 100 | 5 | 101 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
C2H 3F3 | 348 | 0.1 | 6 | 10 | 1 | 11 | 100 | 5 | 101 | 500 | 10 | 501 | 1000 | 14.5 - 43.5 | 400 |
C2H6 | 54 | 0.1 | 6 | 20 | 1 | 21 | 100 | 5 | 101 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
C2H6O | 73 | 0.1 | 6 | 20 | 1 | 21 | 100 | 5 | 101 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
C3F6 | 138 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 500 | - | - | - | 3.3 - 43.5 | 400 |
C3F8 | 128 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | - | - | - | 14.5 - 43.5 | 400 |
C3H2F4 | 393 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
C3H2F6 | 267 | 0.1 | 6 | 10 | 1 | 11 | 100 | 5 | 101 | 500 | - | - | - | 0.3 - 25 | 400 |
C3H6 | 61 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
C3H8 | 89 | 0.1 | 6 | 20 | 1 | 21 | 100 | 5 | 101 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
C3H8O | 187 | 0.1 | 6 | 10 | 1 | 11 | 100 | 5 | 101 | 500 | 10 | 501 | 1000 | 14.5 - 43.5 | 400 |
C3H 10Si (TMS) | 190 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 500 | - | - | - | 3.3 - 7.2 | 400 |
C4F6 | 270 | 0.1 | 6 | 10 | 1 | 11 | 100 | 5 | 101 | 500 | - | - | - | 0.3 - 22.6 | 400 |
C4F6-q | 297 | 0.1 | 6 | 10 | 1 | 11 | 100 | 5 | 101 | 500 | - | - | - | 0.3 - 15.9 | 400 |
C4F8 | 129 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 500 | - | - | - | 3.3 - 29.2 | 400 |
C4F8-i | 236 | - | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 500 | - | - | - | 0.3 - 30 | 400 |
C4H 10 | 117 | 0.1 | 6 | 10 | 1 | 11 | 100 | 5 | 101 | 500 | 10 | 501 | 1000 | 0.3 - 22 | 400 |
C4H2F6 | 402 | 0.1 | 6 | 10 | 1 | 11 | 100 | 5 | 101 | 500 | - | - | - | 0.3 - 8 | 400 |
C5F8 | 266 | 0.1 | 6 | 10 | 1 | 11 | 100 | 5 | 101 | 500 | - | - | - | (-3.7) – (-0.2) | Vacuum |
CF3I | 360 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 500 | 10 | 501 | 1000 | 14.5/35.3 - 43.5* | 400 |
CF4 | 63 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 1000/2000 | 14.5/35.3 - 43.5** | 400 |
CH2F2 | 160 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 1500/2000 | 14.5/35.3 - 43.5** | 400 |
CH 3F | 33 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 1500/2000 | 14.5/35.3 - 43.5** | 400 |
CHF3 | 49 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 1200/2000 | 14.5/35.3 - 43.5** | 400 |
CH4 | 28 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
ClF3 | 77 | 0.1 | 6 | 10 | 1 | 21 | 100 | 5 | 101 | 500 | - | - | - | 0.3 - 12 | 400 |
Cl2 | 19 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 1500/2000 | 14.5/35.3 - 43.5** | 400 |
CO | 9 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
CO 2 | 25 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
COS | 34 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 1500/2000 | 14.5/35.3 - 43.5** | 400 |
COS - Special | 5022 | 0.1 |
6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 1500/2000 | 14.5/35.3 - 43.5** | 400 |
F2 | 18 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000/3000 | 14.5/35.3 - 43.5** | 400 |
GeH4 | 43 | 0.1 | 6 | 20 | 1 | 21 | 100 | 5 | 101 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
H2 | 7 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
HBr | 10 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | - | - | - | 14.5 - 43.5 | 400 |
HCl | 11 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
He | 1 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
| Standard application code examples |
I | II | III | IV | V | VI | VII | VIII | IX |
V100 | XX | X | 0004-500C | 02 | C | V | DA | XXXX |
Blank Model Code Example |
I | II | III | IV | V | VI | VII | VIII | IX |
V100 | XX | C | PS02-200C | 03 | C | V | DI | XXXX |
Low-Pressure Gas Application Code Example |
I | II | III | IV | V | VI | VII | VIII | IX |
V100 | LP | X | 0266-500C | 01 | C | V | AA | XXXX |
gas | Gas No. | Bin 1: 20 sccm | Bin 2: 200 sccm | Bin 3: 1000 sccm | Bin 4: 2000 sccm | Input Gas Pressure Range (psig) | Maximum Downstream Gas Pressure (Torr) |
Minimum Flow | Full scale setting | Minimum Flow | Full scale setting | Minimum Flow | Full scale setting | Minimum Flow | Full scale setting |
Min | Max | Min | Max | Min | Max | Min | Max |
Kr | 5 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
N2 | 13 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000/3000 | 14.5/35.3 - 43.5* | 400 |
N2O | 27 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000/3000 | 14.5/35.3 - 43.5* | 400 |
Ne | 2 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
NF3 | 53 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
NH3 | 29 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
O2 | 15 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000/3000 | 14.5/35.3 - 43.5* | 400 |
PF3 | 62 |
0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 |
10 |
1001 | 2000 | 14.5 - 43.5 | 400 |
SF6 | 110 |
0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 |
10 |
1001 | 2000 | 14.5/35.3 - 43.5** | 400 |
Si2H6 | 97 |
0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 |
10 |
1001 | 1500 | 14.5 - 43.5 | 400 |
SiCl4 | 108 | - | - | - | - | - | - | 1 | 10 | 100 | - | - | - | (-11.7)- (-10.1) | Vacuum |
SiF4 | 88 | - | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | - | - | - | 14.5 - 43.5 | 400 |
SiH2Cl2 | 67 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 3.3 - 13.6 | 400 |
SiH4 | 39 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
SO2 | 32 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
WF6 | 121 | 0.1 | 6 | 10 | 1 | 11 | 100 | 5 | 101 | 500 | - | - | - | (-2.7) - 7.0 | Vacuum |
Xe | 6 | 0.1 | 6 |
10 | 1 | 11 | 100 | 5 | 101 | 500 | - | - | - | 14.5 - 43.5 | 400 |
5% B2H6 in Ar | 615 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
5% B2H6 in H2 | 722 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 – 43.5 | 400 |
5% B2H6 in N2 | 654 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
6% B2H6 in N2 | 927 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
10% B2 H6 in N2 | 666 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
2.7% C2 H4 in He | 897 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
3% C2 H4 in He | 878 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
30% C2 H4 in He | 946 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
3% H2 in N2 | 597 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
4% H2 in N2 | 607 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
20% F2 in Ar | 980 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000/3000 | 14.5/35.3 - 43.5* | 400 |
20% O2 in He | 536 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
30% O2 in He | 604 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
5% PH3 in H2 | 709 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
50% PH3 in SiH4 | 632 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
20% SiH4 in He | 529 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 14.5 - 43.5 | 400 |
N2 Cal Atm | 0 | 0.1 | 6 | 20 | 1 | 21 | 200 | 5 | 201 | 1000 | 10 | 1001 | 2000 | 45.3 - 75.3 | 760 |
Note: The maximum inlet pressure for non-low vapor pressure gases flowing into vacuum up to 400°F is 58.2 psia (401.3 kPaA). When performing verification tests with atmospheric pressure gases, the inlet pressure must be greater than 60 psia.
For low-pressure gases such as C3H2F6, C3H10Si, C4H2F6, C5F8, SiCl4, BCl3, C4F6,
C4F8, and WF6, an LP-MFC is required. The inlet pressures listed in the table are at an operating temperature of 25°C. Gas performance may not meet requirements for flow rates outside this temperature range. For SiCl4, the minimum flow rate is 1 sccm, provided the pressure requirements are met. If you require other configurations, please contact our sales representatives. *For SF6, CF4, CF3I, CH2F2, CH3F, Cl2, COS, COS-Special, and C2F4, a Customer Special Request (CSR126) is required, and for the specified higher full-scale flow rates, the minimum inlet pressure is 35.3 psig.
Standard application code examples |
I | II | III | IV | V | VI | VII | VIII | IX |
V100 | XX | X | 0004-500C | 02 | C | V | DA | XXXX |
Blank Model Code Example |
I | II | III | IV | V | VI | VII | VIII | IX |
V100 | XX | C | PS02-200C | 03 | C | V | DI | XXXX |
Low-Pressure Gas Application Code Example |
I | II | III | IV | V | VI | VII | VIII | IX |
V100 | LP | X | 0266-500C | 01 | C | V | AA | XXXX |
